滚珠丝杠螺母内沟道超精密研磨加工的利器—空气电主轴-「机床主轴」-马可波罗网

品牌/型号: 洛阳传顺

品牌: 洛阳传顺

主轴锥孔: 多种形式

额定转速: 4000--60000（rpm）rpm

最大转速温升: 25（℃）℃

动平衡: 1（mg）

最大转速噪音: 40（db）db

锥孔振摆: 0.0001（mm）

适用机床: 万能磨床、内圆磨床、外圆磨床、轴承沟道磨床、平面磨床、螺纹磨床、雕刻机、划片切割机、刀具磨刃机、超精密车床

是否库存: 是

是否批发: 是

加工定制: 是

滚珠丝杠螺母内沟道超精密研磨加工的利器—空气电主轴

0.1um超精密气静压主轴系统技术特点超精密加工机床的主轴在加工过程中直接支持工件或刀具的运动，故主轴的回转精度直接影响到工件的加工精度。因此可以说主轴是超精密加工机床中最重要的一个部件，通过机床主轴的精度和特性可以评价机床本身的精度。目前研制开发的超精密加工机床的主轴中精度最高的是静压空气轴承主轴。空气轴承主轴具有良好的振摆回转精度。主轴振摆回转精度是除去轴的圆度误差和加工粗糙度影响之外的轴心线振摆，即非重复径向振摆，属于静态精度。目前高精度空气轴承主轴回转精度可达0.05µm，最高可达0.03µm，由于轴承中支承回转轴的压力膜的均化作用，空气轴承主轴能够得到高于轴承零件本身的精度。例如主轴的回转精度大约可以达到轴和轴套等轴承部件圆度的1/15～1/20。日本学者研究表明，当轴和轴套的圆度达到0.15～0.2µm的精度时，可以得到10nm的回转精度，并通过FFT测定其所制造的精度最高的空气轴承主轴的回转精度为8nm。另外，空气轴承主轴还具有动特性良好、精度寿命长、不产生振动、刚性/载荷量具有与使用条件相称的值等优点。应用范围·半导体行业：半导体材料的划片切割机、PCB打孔及、硅片平面研磨机等。·手机行业：手机表面高光、倒角，精细加工。·光学行业：玻璃镜片研磨、精密雕刻，超精密光学磨具表面高光加工。·机械加工行业：平面超精研磨、内外园超精研磨、轴承沟道磨床、螺纹超精研磨，超精密车床、超精密雕刻机、刀具磨刃机等。 主要技术性能1、工件主轴、砂轮电主轴采用气静压空气轴承，技术先进、结构合理，具有自主知识产权。              2、主轴冷却效果好、轴系热变化小。3、主轴精度高（旋转精度&le;0.1um）、振动小（振动值&le;0.5mm/s） 。                  4、恒功率，高扭矩、高刚性5、转速采用变频控制，可实现矢量控制，转速控制精度可达±0.1%。6、转轴与砂轮接杆连接有多种形式，有直孔、ER、内锥、外锥等形式。 7、适合：万能磨床、内圆磨床、外圆磨床、轴承沟道磨床、平面磨床、螺纹磨床、雕刻机、划片切割机、刀具磨刃机、超精密车床等设备的主轴系统升级改造。8、配全自动空气轴承专用三级精密过滤器，以及进口中频矢量变频器。9、各种智能保护报警功能完善，包括：防转轴抱死保护及报警，压缩空气欠压、失压保护及报警，过流（过载）保护及报警，主轴无冷却水保护及报警等。 应用实例1、 柳州螺纹磨床砂轮主轴升级改造，用于滚珠丝杠螺母内螺纹超精密研磨加工。2、 美国摩尔坐标磨床磨头主轴升级改造，用于精密磨具坐标孔超精密研磨加工。3、 光学镜片研磨机主轴升级改造，用于光学镜片平面的超精密研磨加工。4、 光学磨具表面高光机主轴升级改造，用于光学磨具表面超精密高光加工。5、 雕刻机高速主轴升级改造，用于手机表面高光、精密雕刻加工。6、 数控车床工件主轴升级改造，用于半导体切割刀片基体超精密加工。7、 轴承沟道超精磨床升级改造，用于P2、P4级轴承沟道超精密研磨加工。8、 M131万能磨床工件主轴，内圆、外圆砂轮主轴升级改造，用于精密零件内外圆超精密研磨加工。应用方案0.1um超精密气静压万能磨床主轴系统精度升级技术方案本方案采用0.1um超精密气静压（空气轴承）主轴系统对传统万能磨床的2-3um主轴系统进行升级改造，从而可以大大提高整机的精度，具体方案如下：一、       系统组成1、           主要配置清<table align="left" border="1" cellpadding="0" cellspacing="0" style="width: 685px;"><tr><td style="border: windowtext 1pt solid;" valign="top" width="25">序号</td><td style="border-right: windowtext 1pt solid; border-top: windowtext 1pt solid; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="168">品 名</td><td style="border-right: windowtext 1pt solid; border-top: windowtext 1pt solid; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="96">规格型号</td><td style="border-right: windowtext 1pt solid; border-top: windowtext 1pt solid; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72">额定转速rpm</td><td style="border-right: windowtext 1pt solid; border-top: windowtext 1pt solid; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="81">额定功率kw</td><td style="border-right: windowtext 1pt solid; border-top: windowtext 1pt solid; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72">工作气压mpa</td><td style="border-right: windowtext 1pt solid; border-top: windowtext 1pt solid; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="65">旋转精度um</td><td style="border-right: windowtext 1pt solid; border-top: windowtext 1pt solid; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="59">厂家</td><td style="border-right: windowtext 1pt solid; border-top: windowtext 1pt solid; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="48">数量</td></tr><tr><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: windowtext 1pt solid; border-bottom: windowtext 1pt solid;" valign="top" width="25">1</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="168">气静压工件电主轴</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="96">CS-140QD04</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72">4000</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="81">0.75</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72">&ge;0.5</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="65">&le;0.1</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="59">传顺</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="48">1套</td></tr><tr><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: windowtext 1pt solid; border-bottom: windowtext 1pt solid;" valign="top" width="25">2</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="168">气静压内圆砂轮电主轴</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="96">CS-70QD60</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72">60000</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="81">1.5</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72">&ge;0.5</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="65">&le;0.1</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="59">传顺</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="48">1套</td></tr><tr><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: windowtext 1pt solid; border-bottom: windowtext 1pt solid;" valign="top" width="25">3</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="168">气静压内圆砂轮电主轴</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="96">CS-100QD30</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72">30000</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="81">2.2</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72">&ge;0.5</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="65">&le;0.1</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="59">传顺</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="48">1套</td></tr><tr><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: windowtext 1pt solid; border-bottom: windowtext 1pt solid;" valign="top" width="25">4</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="168">气静压外圆砂轮电主轴</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="96">CS-140QD10</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72">10000</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="81">2.2</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72">&ge;0.5</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="65">&le;0.1</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="59">传顺</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="48">1套</td></tr><tr><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: windowtext 1pt solid; border-bottom: windowtext 1pt solid;" valign="top" width="25">5</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="168">气静压顶尖</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="96">CS-80QJ</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="81"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72">&ge;0.5</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="65">&le;0.1</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="59">传顺</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="48">1套</td></tr><tr><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: windowtext 1pt solid; border-bottom: windowtext 1pt solid;" valign="top" width="25">6</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="168">工件轴变频控制器</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="96">VFD022B43A</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="81"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="65"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="59">台达</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="48">1台</td></tr><tr><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: windowtext 1pt solid; border-bottom: windowtext 1pt solid;" valign="top" width="25">7</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="168">内圆砂轮轴变频控制器</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="96">VFD022B43A</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="81"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="65"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="59">台达</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="48">1台</td></tr><tr><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: windowtext 1pt solid; border-bottom: windowtext 1pt solid;" valign="top" width="25">8</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="168">外圆砂轮轴变频控制器</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="96">VFD037B43A</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="81"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="65"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="59">台达</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="48">1台</td></tr><tr><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: windowtext 1pt solid; border-bottom: windowtext 1pt solid;" valign="top" width="25">9</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="168">保护压力开关</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="96"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="81"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="65"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="59"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="48">2件</td></tr><tr><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: windowtext 1pt solid; border-bottom: windowtext 1pt solid;" valign="top" width="25">10</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="168">三级精密空气过滤器</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="96">CS-QGL-3</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="81"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="65"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="59">传顺</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="48">1套</td></tr><tr><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: windowtext 1pt solid; border-bottom: windowtext 1pt solid;" valign="top" width="25"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="168">合计</td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="96"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="81"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="72"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="65"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="59"> </td><td style="border-right: windowtext 1pt solid; border-top: medium none; border-left: medium none; border-bottom: windowtext 1pt solid;" valign="top" width="48">11</td></tr></table> 本系统由气静压工件电主轴、气静压内圆砂轮电主轴、气静压外圆砂轮电主轴、气静压顶尖组成超精密气静压万能磨床的加工轴系。电主轴转速控制选用台达系列变频控制器，压缩空气以及主轴水冷却采用原设备现有供给系统。主轴安装方式可参考原有磨床主轴安装尺寸，采用HAFU夹紧方式。气静压内圆砂轮电主轴采用瑞士产ER16弹簧夹头（或直杆）；气静压外圆砂轮电主轴采用Φ32直杆形式安装外圆砂轮；气静压工件电主轴采用多组工件夹具，可安装卡盘、顶尖等夹具（具体尺寸需用户确认）。本系统在气路、水路进口处加有压力传感器，具有过流、过载、气压低于下限、以及冷却水断流等故障报警保护功能。并且具有和上位机通讯功能（RS-485）。

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